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Ab initio study of misfit dislocations at the SiC/Si(001) interface

Giancarlo Cicero1, Laurent Pizzagalli, Alessandra Catellani

  • 1INFM & Physics Department, Polytechnic of Torino, C. Duca degli Abruzzi, 24, I-10129 Torino, Italy.

Physical Review Letters
|October 9, 2002
PubMed
Summary

Investigating silicon carbide on silicon, researchers found dislocation networks effectively relieve strain. However, interface states in the band gap could compromise electronic device reliability.

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