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SMART--a program to measure SEM resolution and imaging performance

D C Joy1

  • 1EM Facility, University of Tennessee, Knoxville, TN 37996-0840, USA. djoy@utk.edu

Journal of Microscopy
|October 9, 2002
PubMed

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Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
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