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Differential wavelength-scanning heterodyne interferometer for measuring large step height.

Sheng-Hua Lu1, Ching-I Chiueh, Cheng-Chung Lee

  • 1The authors are with the Institute of Optical Sciences, National Central University, Jungli City, Taoyuan, Taiwan. SHLU@itri.org.tw

Applied Optics
|October 10, 2002
PubMed
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This study presents a novel interferometer for accurately measuring large step heights. The new design offers enhanced stability and precision, achieving an accuracy of approximately 100 nm.

Area of Science:

  • Metrology
  • Optical Engineering
  • Surface Characterization

Background:

  • Accurate measurement of large step heights is crucial in various industrial and scientific applications.
  • Traditional interferometers can be sensitive to environmental disturbances, limiting their accuracy.
  • Phase ambiguity is a common challenge in interferometric measurements.

Purpose of the Study:

  • To develop and validate a novel interferometer for precise measurement of large step heights.
  • To enhance the robustness of interferometric measurements against environmental noise.
  • To overcome the phase ambiguity problem in step height determination.

Main Methods:

  • Utilizing a differential heterodyne configuration combined with wavelength-scanning interferometry.

Related Experiment Videos

  • Employing a tunable diode laser for illumination to resolve phase ambiguity.
  • Simulating large step heights using gauge blocks (5, 10, and 50 mm) on a steel plate.

    • Main Results:

    • The proposed interferometer demonstrates reduced sensitivity to environmental disturbances.
    • Accurate measurement of interference phases was achieved.
    • Step height was directly determined by counting interference fringes during wavelength scanning.
    • The system achieved an accuracy of approximately 100 nm when compared to a gauge block interferometer.

    Conclusions:

    • The developed differential heterodyne and wavelength-scanning interferometer is effective for measuring large step heights.
    • The system offers improved stability and accuracy compared to conventional methods.
    • This technique provides a reliable solution for precise metrology applications requiring large step height measurements.