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Microscopic phase-shifting profilometry based on digital micromirror device technology.

Chengping Zhang¹, Peisen S Huang, Fu-Pen Chiang

¹Department of Mechanical Engineering, State University of New York at Stony Brook, 11794-2300, USA. chenzhan@ic.sunysb.edu

|October 10, 2002

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This study introduces a novel microscopic 3-D shape measurement system using digital fringe projection. The developed system accurately captures surface profiles of rough objects at the micrometer level.

Area of Science:

Optical Metrology
Microscopy
Surface Characterization

Background:

Accurate 3-D surface measurement is crucial for micro-scale applications.
Existing techniques may face limitations in resolution and applicability to rough surfaces.

Purpose of the Study:

To develop and validate a microscopic 3-D shape measurement system.
To assess its performance for measuring rough surfaces at the micrometer level.

Main Methods:

Integration of a Digital Micromirror Device (DMD) into a stereomicroscope for fringe pattern projection.
Utilizing a CCD camera to record deformed fringe patterns.
Employing a phase-shifting technique for 3-D shape reconstruction.

Main Results:

Related Experiment Videos

Successful experimental demonstration of the microscopic 3-D shape measurement system.
Accurate surface profile measurement of rough surfaces achieved at the micrometer level.
Validation of the digital fringe projection technique for micro-scale metrology.

Conclusions:

The developed digital fringe projection system offers a viable solution for microscopic 3-D shape measurement.
The system demonstrates high precision for characterizing rough surfaces.
Further design considerations and error analysis support system optimization.