Benyong Chen1, Xiaohui Cheng, Dacheng Li
1Department of Precision Instruments, Tsinghua University, Beijing, China. chenby@post.pim.tsinghua.edu.cn
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A novel fringe subdivision method uses a large synthetic wavelength to enhance fringe analysis. This enables a dual-wavelength interferometric technique achieving subnanometric resolution of 0.05 nm.
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