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Related Experiment Videos

Calibration of subnanometer motion with picometer accuracy.

Hernán E Grecco1, Oscar E Martínez

  • 1Departamento de Física Facultad de Ciencias Exactas y Naturales, Universidad de Buenos Aires, Ciudad Universitaria, Argentina.

Applied Optics
|November 5, 2002
PubMed
Summary

We developed a precise method to calibrate piezoelectric actuators for scanning probe microscopy. This technique accurately measures subnanometer movements, crucial for advanced imaging systems.

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Area of Science:

  • Physics
  • Instrumentation
  • Nanotechnology

Background:

  • Piezoelectric actuators are essential for precise motion control in advanced microscopy.
  • Accurate calibration is critical for subnanometer positioning, especially in scanning probe microscopy.
  • Existing calibration methods may lack accuracy across a wide frequency range.

Purpose of the Study:

  • To develop a method for calibrating subnanometer piezoelectric actuator movements with picometer accuracy.
  • To validate the calibration method across a broad frequency spectrum.
  • To assess the impact of higher harmonics on actuator response and calibration.

Main Methods:

  • Utilizing a Michelson interferometer with a mobile arm.
  • Simultaneously measuring interferometric signals and their derivatives.

Related Experiment Videos

  • Vibrating the piezoelectric actuator at various frequencies.

    • Main Results:

    • Achieved picometer accuracy for subnanometer displacement calibration.
    • Demonstrated the method's utility for frequencies up to approximately 10 kHz, revealing linearity.
    • Identified the appearance of higher harmonics above 10 kHz, necessitating their consideration for accurate displacement.
    • Enabled measurement of system hysteresis.

    Conclusions:

    • The developed method provides accurate calibration for piezoelectric actuators across a wide frequency range.
    • Higher harmonics significantly affect actuator response above 10 kHz and must be accounted for in calibration.
    • This technique is vital for validating calibration or detection schemes relying on actuator linearity in scanning probe microscopy.