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Phase-modulation scatterometry.

Petre C Logofătu¹

¹Center of High Technology Materials, University of New Mexico, 1313 Goddard Street, Southeast, Albuquerque, New Mexico 87106, USA. logofatu@unm.edu

|December 13, 2002

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Phase-modulation scatterometry accurately measures grating parameters by analyzing light reflectance. This technique achieves sub-nanometric precision for critical dimensions, overcoming phase-modulation amplitude errors.

Area of Science:

Metrology
Optical Engineering
Nanotechnology

Background:

Phase-modulation scatterometry is a key technique for determining grating parameters.
Phase-modulation amplitude fluctuations are a primary source of error.

Purpose of the Study:

To enhance the accuracy of phase-modulation scatterometry.
To identify optimal measurement configurations for precise grating parameter determination.

Main Methods:

Utilized a phase modulator and photodetector to convert modulated reflectance into a signal.
Analyzed the direct term and first two harmonics of the signal.
Employed the ratio of harmonics to the direct term for improved data fitting accuracy.
Conducted a sensitivity analysis on real and theoretical grating samples.

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Main Results:

The ratio of harmonics to the direct term significantly improved data fitting accuracy.
Sensitivity analysis identified optimal measurement configurations.
Sub-nanometric precision was achieved for critical dimensions (grating linewidth).
Theoretical predictions for sensitivity showed good agreement with experimental values for a real sample.

Conclusions:

Phase-modulation scatterometry, with optimized configurations and data analysis, offers high precision for grating metrology.
The developed method effectively mitigates errors associated with phase-modulation amplitude fluctuations.
Sub-nanometric precision in determining critical dimensions is achievable, advancing nanoscale fabrication and characterization.