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Accuracy of electrostatic lens computations with FOFEM.
1Institute of Scientific Instruments, Academy of Sciences of the Czeck Republic, Kralovopolska 146, Brno 61264, Czech Republic. lencova@isibrno.cz
Ultramicroscopy
|December 21, 2002
Summary
Fast computation of electrostatic lenses is now possible using the first-order finite element method. A new procedure estimates accuracy by doubling mesh points, revealing potential errors and their sources.
Area of Science:
- Computational physics
- Electrostatic lens design
Background:
- Personal computer advancements enable complex simulations.
- Accurate computation of electrostatic lenses is crucial for device performance.
Purpose of the Study:
- To propose a method for estimating the accuracy of computed electrostatic potentials.
- To identify and visualize sources of computational errors in electrostatic lens simulations.
Main Methods:
- Utilizing the first-order finite element method for rotationally symmetric electrostatic lenses.
- Implementing a mesh refinement strategy by doubling mesh points in each coordinate.
- Analyzing potential error information derived from comparing different mesh densities.
Main Results:
- Demonstrated fast computation of electrostatic lenses with high mesh densities.
- Developed a procedure to estimate the accuracy of the computed potential.
- Enabled visualization of computational error sources.
Conclusions:
- The proposed method provides a reliable way to assess accuracy in electrostatic lens computations.
- Error visualization aids in understanding and improving simulation models.
- Increased computational power facilitates advanced simulations in electromagnetics.