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Crossflow electro-microfiltration of oxide-CMP wastewater.
Gordon C C Yang1, Tsung-Yin Yang, Shiou-Huei Tsai
1Institute of Environmental Engineering, National Sun Yat-Sen University, Kaohsiung 804, Taiwan Republic of China. gordon@mail.nsysu.edu.tw
Water Research
|January 18, 2003
Summary
Electrically enhanced crossflow microfiltration (EECMF) effectively treats oxide-CMP wastewater, improving filtration rates with optimized operating conditions. The treated water quality allows for potential reuse in non-process applications.
Area of Science:
- Environmental Engineering
- Materials Science
Background:
- Wastewater from semiconductor manufacturing, specifically oxide chemical mechanical planarization (CMP), presents significant treatment challenges.
- Effective wastewater treatment is crucial for environmental sustainability and resource recovery in the semiconductor industry.
Purpose of the Study:
- To investigate the performance of an electrically enhanced crossflow microfiltration (EECMF) system for treating oxide-CMP wastewater.
- To determine the impact of various operating parameters on the filtration rate and filtrate quality.
Main Methods:
- Utilized an EECMF system with a 0.1 micrometer cut-size membrane to treat oxide-CMP wastewater.
- Systematically varied operating parameters including crossflow velocity, transmembrane pressure, electric field mode and strength, and backwashing mode.
- Characterized wastewater and filtrate using standard methods, focusing on turbidity.
Main Results:
- Filtration rate increased with higher crossflow velocity, transmembrane pressure, and electric field strength (below critical threshold).
- Intra-filtration-run backwashing demonstrated superior performance over inter-filtration-run backwashing.
- Pulsed electric field mode showed improved filtration rates compared to no electric field, but was less effective than continuous mode.
Conclusions:
- The EECMF system is a viable technology for treating oxide-CMP wastewater.
- Optimized operating conditions significantly enhance filtration efficiency.
- Achieved filtrate turbidity of 0.39 NTU suggests potential for water reuse in non-critical applications, promoting water conservation.