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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
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To-and-fro motion of W5Si3 on a beta-Si3N4 substrate at elevated temperatures

S Arai1, K Suzuki, H Saka

  • 1Center for Integrated Research in Science and Technology, Nagoya University, 464-8603, Japan.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|January 21, 2003
PubMed

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