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First tests of a dipole lens for a scanning electron microscope
1The Enrico Fermi Institute, The University of Chicago, 5640 South Ellis Avenue, IL 60637, USA.
Journal of Microscopy
|January 22, 2003
Abstract:
We have previously shown that a dipole lens has superior properties that are particularly suited for use in a low voltage scanning electron microscope (SEM) (Tsai & Crewe, 1996). The aberrations are lower than for any other type of lens and lead to a prediction of high resolution. We describe the construction details of a microscope based on this principle and present some early results.