Performance characteristics of a pressure microsensor
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Updated: Sep 27, 2026

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing
Published on: March 17, 2023
Kenton R Kaufman1, Tom Wavering, Duane Morrow
1Biomechanics Laboratory, Division of Orthopedic Research, Mayo Clinic, 200 First street, SW, Rochester, MN 55905, USA. kaufman.kenton@mayo.edu
Abstract:
A new fiber optic microsensor has been developed for pressure measurement. The pressure microsensor is extremely small (360 micro m). Performance characteristics of the microsensor were evaluated over a pressure range from 0 to 250mmHg. Five sensors were compared to a National Institute of Standards and Technology traceable reference pressure. The microsensor had an accuracy, repeatability, and linearity better than 2% full-scale output (FSO) and a hysteresis of 4.5% FSO.
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