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Scattering Cross Sections in Electron Microscopy and Analysis.

Peter Rez1

  • 1Department of Physics and Astronomy, and Center for Solid State Science, Arizona State University, Tempe, AZ 85287.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|February 25, 2003
PubMed
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This study reviews electron scattering cross sections, crucial for understanding interactions in electron microscopy. It covers basic elastic and inelastic scattering principles and recent advancements like Fano resonances.

Area of Science:

  • Physics
  • Materials Science
  • Microscopy

Background:

  • Scattering cross section quantifies interaction strength in electron microscopy.
  • Coulomb interaction underlies all electron scattering, both elastic and inelastic.
  • Understanding these cross sections is vital for high-resolution and analytical microscopy.

Purpose of the Study:

  • To review fundamental elastic and inelastic scattering cross sections.
  • To discuss their application in advanced electron microscopy techniques.
  • To highlight recent developments in calculating scattering phenomena.

Main Methods:

  • Review of established theoretical forms for elastic and inelastic scattering cross sections.
  • Analysis within the context of high-resolution transmission electron microscopy (HRTEM) and analytical electron microscopy (AEM).

Related Experiment Videos

  • Discussion of computational methods for specific phenomena like Fano resonances.

    • Main Results:

    • Common features of elastic and inelastic scattering cross sections derived from the Coulomb interaction are presented.
    • Simple forms of cross sections applicable to microscopy are reviewed.
    • The significance of Fano resonances in electron energy loss spectroscopy (EELS) is discussed.

    Conclusions:

    • Scattering cross sections are fundamental to interpreting electron microscopy data.
    • A comprehensive understanding of scattering is essential for advanced analytical techniques.
    • Recent developments offer deeper insights into electron-matter interactions.