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Updated: Jul 15, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

Ultra-high-Q toroid microcavity on a chip.

D K Armani¹, T J Kippenberg, S M Spillane

¹Department of Applied Physics, California Institute of Technology, Pasadena, California 91125, USA.

|February 28, 2003

Summary

Researchers developed novel silica toroid microresonators on-a-chip, achieving ultra-high Q factors over 100 million. This breakthrough rivals droplet microcavities, enabling advanced applications in photonics and quantum technologies.

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Fabrication of Silica Ultra High Quality Factor Microresonators

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Area of Science:

Photonics and Optical Engineering
Materials Science
Quantum Technologies

Background:

Dielectric microcavities store optical power at resonant frequencies, crucial for cavity quantum electrodynamics, photonics, biosensing, and nonlinear optics.
Surface-tension-induced microcavities (e.g., droplets, spheres) offer superior photon lifetime (Q factor) due to atomic-scale surface finish.
Existing chip-based resonators have significantly lower Q factors, limiting their use in ultra-high-Q experiments.

Purpose of the Study:

To develop a fabrication process for chip-based microresonators with ultra-high Q factors.
To overcome the limitations of current wafer-based resonators and achieve performance comparable to surface-tension-induced microcavities.

Main Methods:

Utilized a combination of lithography and dry etching for precise resonator patterning on a wafer.
Employed a selective reflow process to achieve near-atomic-scale surface smoothness on the fabricated silica structures.
Fabricated toroid-shaped microresonators on-a-chip.

Main Results:

Achieved Q factors exceeding 100 million for the silica toroid microresonators.
This represents an improvement of nearly four orders of magnitude compared to previous chip-based resonators.
The demonstrated Q factors are comparable to those of ideal surface-tension-induced microcavities.

Conclusions:

The developed process enables the fabrication of ultra-high-Q microresonators on-a-chip.
This advancement bridges the performance gap between chip-based and droplet microcavities.
The new resonators are suitable for demanding applications requiring extremely long photon lifetimes.