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Related Experiment Videos

Spectral interference Mirau microscope with an acousto-optic tunable filter for three-dimensional surface

Dalip Singh Mehta1, Shohei Saito, Hideki Hinosugi

  • 1University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan.

Applied Optics
|March 18, 2003
PubMed
Summary

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This study introduces a nonmechanical scanning spectral interference microscope for 3D surface profiling. It accurately measures step heights on discontinuous objects without phase ambiguity.

Area of Science:

  • Optical Metrology
  • Surface Profilometry
  • Interferometry

Background:

  • Traditional surface measurement techniques often struggle with discontinuous objects.
  • Nonmechanical scanning methods offer advantages in speed and precision.
  • Spectral interference microscopy provides high-resolution surface data.

Purpose of the Study:

  • To develop a nonmechanical scanning Mirau-type spectral interference microscope.
  • To enable accurate 3D surface profiling of discontinuous objects.
  • To overcome limitations of phase ambiguity in large measurement ranges.

Main Methods:

  • Utilized an acousto-optic tunable filter (AOTF) for spectral scanning.
  • Employed an unbalanced Mirau interferometric system with a superluminescent diode.

Related Experiment Videos

  • Developed a 3D Fourier-transform technique for fringe analysis and sign determination.

    • Main Results:

    • Successfully measured a 100-microm step height.
    • Demonstrated nonmechanical scanning for 3D surface profiling.
    • Achieved a large measurement range without ambiguity in phase sign.

    Conclusions:

    • The developed system offers nonmechanical scanning for precise 3D surface measurements.
    • The method effectively handles discontinuous objects with large step heights.
    • Eliminates phase sign ambiguity, enhancing measurement reliability.