Youichi Sakawa1, Hiroyuki Kunimatsu, Hideki Kikuchi
1Department of Energy Engineering and Science, Nagoya University, Nagoya 464-8603, Japan. g44210a@nucc.cc.nagoya-u.ac.jp
Researchers observed slow-wave (SW) discharge using radio frequency (rf) waves. This novel SW discharge occurs at lower power and plasma density than typical capacitive-coupling discharges.
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: