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Updated: Aug 12, 2026

Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
Published on: November 24, 2016
N-K ELNES study of anisotropy effects in hexagonal AlN
G Radtke1, T Epicier, P Bayle-Guillemaud
1GEMPPM, umr CNRS 5510, INSA de Lyon, 20 av. Albert Einstein, F-69621 Villeurbanne Cedex, France. guillaume.radtke@insa-lyon.fr
Abstract:
Anisotropic effects in hexagonal aluminium nitride have been studied by electron energy-loss spectroscopy (EELS) in the N-K energy loss near edge structure (ELNES). Experimental data acquired with different collection angles and with a nearly parallel incident electron beam aligned along the c-axis have been compared to simulations based on ab initio calculations. The extraction of intrinsic parallel I|| (with momentum transfer q || c axis) and perpendicular I perpendicular (with momentum transfer q perpendicular c axis) components has been performed directly from the experimental spectra. This has been done according to their description as linear combinations of I|| and I perpendicular, with adequate weights deduced from a geometrical model of anisotropic behaviour.
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