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Fourier-transform phase-shifting interferometry.

Leslie L Deck1

  • 1Zygo Corporation, Laurel Brook Road, P.O. Box 448, Middlefield, Connecticut 06455-0448, USA. ldeck@zygo.com

Applied Optics
|May 10, 2003
PubMed
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This study extends phase-shifting interferometry for precise surface measurements by using wavelength tuning to overcome multiple-surface interference issues. This enables simultaneous measurement of parallel plate properties like thickness and homogeneity.

Area of Science:

  • Optical Metrology
  • Surface Characterization
  • Interferometry

Background:

  • Phase-shifting interferometry (PSI) is crucial for high-precision surface measurements.
  • Existing PSI methods are limited by intensity distortions from multiple-surface interference, restricting use to two-beam interference.
  • Generalizing PSI to complex optical systems remains a challenge.

Purpose of the Study:

  • To extend the capabilities of phase-shifting interferometry using wavelength tuning.
  • To address the limitations imposed by multiple-surface interference in optical measurements.
  • To enable simultaneous measurement of parallel plate optical and physical thickness, and homogeneity.

Main Methods:

  • Application of wavelength tuning techniques to phase-shifting interferometry.

Related Experiment Videos

  • Development of theoretical framework for multi-surface interference analysis.
  • Experimental validation using parallel plate samples.

    • Main Results:

    • Successfully extended PSI to handle multiple-surface interference.
    • Simultaneous determination of surface form, optical thickness, physical thickness, and homogeneity for parallel plates.
    • Comparison of experimental results with theoretical predictions and alternative methods.

    Conclusions:

    • Wavelength-tuning PSI effectively overcomes limitations of traditional methods.
    • The technique provides a comprehensive approach for metrology of parallel optical components.
    • This advancement broadens the applicability of PSI in precision optical measurements.