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Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
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Mechanisms and methods to resolve edge effect

Pramod Kuchulakanti1, Robert Lew, Ron Waksman

  • 1Division of Cardiology, Washington Hospital Center, Washington, DC 20010, USA. ron.waksman@medstar.ne

The Journal of Invasive Cardiology
|June 5, 2003
PubMed

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