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Nanostructured silicon surfaces via nanoporous alumina
Matthias Kruse1, Steffen Franzka, Günter Schmid
1Institut für Anorganische Chemie, Universität Essen, Universitätsstr. 5-7, 45117 Essen, Germany.
Chemical Communications (Cambridge, England)
|July 5, 2003
Abstract:
Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching (RIE).