Atsushi Yamada1, Osamu Hirahara, Takayoshi Tsuchida
1JEOL Ltd, 1-2 Musashino 3-Chome, Akishima, Tokyo 196-8558, Japan. ayamada@jeol.co.jp
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A new Web-SEM system allows remote control of scanning electron microscopes via a web browser. This system overcomes internet traffic issues, enabling remote focus adjustment and stage movement for SEM operation.
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