A practical method for the remote control of the scanning electron microscope

We have developed a remote control system for the scanning electron microscope (SEM). It is called Web-SEM and can be accessed by anyone through the Web browser. It is not necessary to install special software to control the SEM. Because the operating performance changes with the amount of traffic on the Internet, we have connected the Web-SEM to a LAN/Internet in order to overcome this. We have checked the performance of the remote control operation and we were able to perform focus adjustment, stage movement, etc. over the Internet by improving the method of operation and image transfer.