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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Experimental investigation of phase contrast formed by inelastically scattered electrons

Koji Kimoto1, Yoshio Matsui

  • 1Advanced Materials Laboratory, National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki, 305-0044, Japan. kimoto.koji@nims.go.jp

Ultramicroscopy
|July 23, 2003
PubMed

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