Günter Möbus1, Ron C Doole, Beverley J Inkson
1Department of Materials, Oxford University, Oxford OX1 3PH, UK. g.moebus@sheffield.ac.uk
Energy filtered imaging (EFTEM) and EDX-mapping in transmission electron microscopy (TEM) enable 3D chemical mapping. These techniques improve nanoscale chemical sensitivity and reconstruction accuracy, overcoming limitations of traditional methods.
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