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Updated: Jul 13, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
10:32

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

Materials science: the road to diamond wafers

S T Lee, Y Lifshitz

    Nature
    |August 2, 2003
    PubMed
    Summary

    No abstract available in PubMed .

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