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Compensation for anamorphotic distortion in grazing-incidence interferometry testing planar specimens.
Jessica Schneider1, Klaus Mantel, Roland Schreiner
1University of Erlangen-Nuremberg, Staudtstrasse 7/B2, 91058 Erlangen, Germany. schneider@kerr.physik.uni-erlangen.de
Applied Optics
|August 15, 2003
Summary
Grazing-incidence interferometry suffers from anamorphotic distortion. A novel setup using a rectifying grating sharpens the interference pattern, improving resolution for planar object measurement.
Area of Science:
- Optics and optical measurement
- Metrology
- Interferometry
Background:
- Grazing-incidence interferometry (GII) exhibits anamorphotic distortion, leading to reduced resolution along the optical axis.
- This foreshortening effect complicates accurate measurement of planar specimens.
Purpose of the Study:
- To develop and evaluate a compensation technique for anamorphotic distortion in GII.
- To enhance image sharpness and resolution across the entire field of view for planar object measurement.
Main Methods:
- A setup was designed to image the object plane onto a rectifying grating.
- A volume hologram and a diffraction grating were employed as rectifying elements.
- The system was used to measure planar objects including mirrors and structured plastic samples.
Main Results:
- The rectifying grating setup successfully compensated for anamorphotic distortion.
- Sharp mapping of the entire specimen onto the detector was achieved.
- Accuracy, image sharpness, and residual distortion were analyzed for both rectifying elements.
Conclusions:
- The proposed method effectively mitigates distortion in GII.
- This technique enables high-resolution metrology of planar objects.
- Both volume holograms and diffraction gratings are viable rectifying elements for this application.
