Functionalized biomicroelectromechanical systems sensors for force response study at local adhesion sites of single

M Taher A Saif1, Chad Randall Sager, Sean Coyer

  • 1Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, 1206 W. Green Street, Urbana, IL 61801, USA. saif@uiuc.edu

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