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The scanning probe microscope
J Jahanmir1, B G Haggar, J B Hayes
1WYKO Corporation, Tucson, AZ 85706.
Scanning Microscopy
|September 1, 1992
Abstract:
Scanning probe microscopy has evolved into a powerful tool since its inception in 1982. The scanning probe microscope has found applications in metrology, spectroscopy, and lithography. We will review the background of the technology, discuss the different types of scanning probe microscopes including the scanning tunneling microscope and the scanning force microscope, and present many of the applications for the instrument.