Grazing exit electron probe microanalysis of submicrometer inclusions in metallic materials

Grazing exit electron probe microanalysis (GE-EPMA) is a new method of EPMA in which characteristic X-rays emitted from only near-surface regions of a specimen are detected at extremely low exit angles near 0 degrees (the grazing exit condition). This technique requires the analytical objects exist on a flat surface. Therefore, the GE-EPMA analysis has been used only for the analysis of particles or a thin film on a flat substrate so that there were only few applications for practical analysis. As a new application, we have carried out GE-EPMA analysis of approximately 0.2-microm inclusions on stainless steel, which appeared to be a projection on the specimen surface with chemical etching. The GE-EPMA quantitative results were in excellent agreement with those of inclusions that were extracted from the stainless steel and analyzed by EPMA with conventional exit condition (30 degrees). This method could be, therefore, applied to the analysis of the submicrometer inclusion in a wide variety of metallic materials if the inclusion appears to be a projection with chemical etching treatment.