Volatile beta-ketoiminato- and beta-diketiminato-based zirconium complexes as potential MOCVD precursors

Pier Luigi Franceschini1, Marcus Morstein, Heinz Berke

  • 1Anorganisch-Chemisches Institut der Universität Zürich, and Department of Materials, Laboratory for Surface Science and Technology, ETH Zürich, Switzerland. franceschini@surface.mat.ethz.ch

Inorganic Chemistry
|October 28, 2003
PubMed

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