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Micro-laser-induced breakdown spectroscopy technique: a powerful method for performing quantitative surface mapping
Denis Menut1, Pascal Fichet, Jean-Luc Lacour
1Commissariat à l'Energie Atomique de Saclay, Nuclear Energy Division, Laboratoire d'Analyse par Laser et d'Etude de Surface, Bâtiment 391, 91 191 Gif sur Yvette, France. menut@carnac.cea.fr
Applied Optics
|November 5, 2003
Summary
This study introduces a micro-laser-induced breakdown spectroscopy (micro-LIBS) device for elemental surface analysis. The micro-LIBS system achieves 3-microm resolution for detailed microchemical mapping of various materials.
Area of Science:
- Analytical Chemistry
- Materials Science
- Spectroscopy
Background:
- Laser-induced breakdown spectroscopy (LIBS) is primarily used for bulk analysis.
- Elemental microanalysis of solid surfaces using LIBS is less common.
- Characterizing microchemical structures on surfaces requires high spatial resolution.
Purpose of the Study:
- To describe a novel micro-LIBS device for elemental surface analysis.
- To demonstrate the device's capability for analyzing microchemical structures.
- To report quantitative microchemical results on ceramic samples.
Main Methods:
- Development of a micro-LIBS device with 3-microm spatial resolution.
- Analysis of both conductive and nonconductive samples.
- Utilizing time-resolved acquisition for spectral analysis.
Main Results:
- Successful characterization of cerium in a uranium matrix.
- Achieved a cerium detection limit of 1.14%.
- Demonstrated high repeatability (2% single-shot) and calibration reproducibility (approx. 7%).
Conclusions:
- The micro-LIBS device enables rapid, high-resolution elemental surface analysis.
- The system is effective for quantitative microchemical analysis of ceramics.
- The method provides reliable and reproducible results for trace element detection.