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Oxidation of the Si(001) surface: lateral growth and formation of P(b0) centers

Takahiro Yamasaki1, Koichi Kato, Tsuyoshi Uda

  • 1Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, Japan. t.yamasaki@jp.fujitsu.com

Physical Review Letters
|November 13, 2003
PubMed

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