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Updated: Aug 29, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Production and characterization of spiral phase plates for optical wavelengths
S S R Oemrawsingh1, J A W van Houwelingen, E R Eliel
1Huygens Laboratory, Leiden University, PO Box 9504, 2300 RA Leiden, The Netherlands. soemraws@molphys.leidenuniv.nl
Abstract:
We describe the fabrication and characterization of a high-quality spiral phase plate as a device to generate optical vortices of low (3-5) specified charge at visible wavelengths. The manufacturing process is based on a molding technique and allows for the production of high-precision, smooth spiral phase plates as well as for their replication. An attractive feature of this process is that it permits the fabrication of nominally identical spiral phase plates made from different materials and thus yielding different vortex charges. When such a plate is inserted in the waist of a fundamental Gaussian beam, the resultant far-field intensity profile shows a rich vortex structure, in excellent agreement with diffraction calculations based on ideal spiral phase plates. Using a simple optical test, we show that the reproducibility of the manufacturing process is excellent.

