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Updated: Aug 10, 2026
Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
Published on: December 21, 2015
Application of ultrahigh vacuum reflection electron microscopy for the study of clean silicon surfaces in
A V Latyshev1, A B Krasilnikov, A L Aseev
1Institute of Semiconductor Physics, Academy of Sciences of the USSR, Siberian Branch, Lavrentieva.
Abstract:
The construction and performance of an ultrahigh vacuum reflection electron microscope (UHV REM) on the base of a transmission electron microscope with top entry stage are described. Some results of in situ study of structural transformations on clean silicon surfaces during sublimation, surface phase transitions, and initial stages of epitaxial growth are shown.
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