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Updated: Aug 26, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Qualitative and quantitative determination of micro-inclusions by automated SEM/EDX analysis
Markus Nuspl1, Wolfhard Wegscheider, Johann Angeli
1voestalpine Stahl GmbH, Voest-Alpine-Str. 3, P.O. Box 3, 4031 Linz, Austria. markus.nuspl@voestalpine.com
Abstract:
With the help of an automated SEM/EDX analysis system non-metallic micro-inclusions in steel can be detected on a metallographically prepared surface area. The system makes it possible to determine position, size, shape and composition of each particle. Usually more than 1000 inclusions are found on one scan area. Therefore a new offline evaluation method has been developed to classify the large amount of inclusions and calculate specific size and shape data. A summary sheet is created to show the area contents and the mean values of all important properties for each class. Size and XY distributions as well as binary and ternary phase diagrams are drawn to depict the results. The strengths of this analytical technique are demonstrated by evaluation of an LC (low-carbon) steel. Alumina, common spinel, sulfide and oxisulfide inclusions could be identified as dominant inclusion types in LC steel.
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