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Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma

V Georgieva1, A Bogaerts, R Gijbels

  • 1Department of Chemistry, University of Antwerp, Universiteitsplein 1, B-2610 Wilrijk-Antwerp, Belgium. Violeta.Georgieva@ua.ac.be

Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics
|March 5, 2004
PubMed

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