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Updated: Aug 25, 2026

Radio Frequency Magnetron Sputtering of GdBa2Cu3O7−δ/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates
Published on: April 12, 2019
Quantitative analysis of thin films of RBa(2)Cu(3)O(7-x) (R-rare earth elements) and ZrO(2) (Y(2)O(3)) buffer layers
J A Rebane1, A R Kaul, Y D Tretyakov
1Chemistry Department, Moscow State University, 119899, Moscow, Russia.
Abstract:
It is shown that RBa(2)Cu(3)O(7-X) single crystals may be used as reference samples for the quantitative analysis of RBa(2)Cu(3)O(7-X) thin films by SNMS. RSF-values for Y and Cu (relative to Ba) determined for ceramic RBa(2)Cu(3)O(7-X) samples are higher than those for single crystals. This difference may be caused by Ba segregation on grain boundaries. The depth profile analysis of YSZ/Al(2)O(3) samples was performed by DBM using a Ni grid to prevent sample charging. The reproducibility of analysis was better than 10%.

