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Updated: Aug 25, 2026

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Published on: June 16, 2014
Microwave sputtering of conductors and insulators for optical emission and mass spectrometry
M H Rümmeli1, M Outred, D E Spillane
1University of North London, Holloway Road, N7 8DB, London, UK.
Abstract:
A microwave-powered slab-line cavity was used to excite a discharge in low pressure argon or neon and to demonstrate the sputtering of conducting and non-conducting samples by a microwave excited discharge. Both optical emission spectroscopy and mass spectrometry were used as detection systems. The dependence of the signals on gas pressure and net microwave power was investigated.
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