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High-resolution, low-voltage SEM for true surface imaging and analysis.

H Jaksch¹, J P Martin

¹Electron Optics Division, Carl Zeiss, D-73446, Oberkochen, Germany.

Analytical and Bioanalytical Chemistry

|October 1, 1995

Summary

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A new scanning electron microscope (SEM) features an innovative electron optical column design. This design achieves ultra-high performance and exceptional resolution, especially at low beam energies, enhancing analytical capabilities.

Area of Science:

Materials Science
Physics
Analytical Chemistry

Background:

Traditional scanning electron microscopes (SEMs) face limitations in resolution and analytical performance.
Electron optical column design is critical for achieving high-performance SEM operation.

Purpose of the Study:

To introduce a novel electron optical column design for an ultra-high performance SEM.
To demonstrate improved resolution and analytical capabilities, particularly at low beam energies.

Main Methods:

Implementation of a novel compound magnetic/electrostatic objective lens.
Elimination of beam cross-over to prevent energy spread broadening (Boersch effect).
Maintenance of high beam energy throughout the column to minimize stray field effects and electron-electron interactions.

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Main Results:

Achieved outstanding resolution, with 3 nm resolution demonstrated at 1 keV.
The new design minimizes imaging aberrations, decreasing with lower beam energy.
High beam current can be focused into a small probe due to low aberration.

Conclusions:

The novel SEM design offers superior resolution and performance, especially at low beam energies.
The instrument is well-suited for high-resolution, quantitative X-ray analysis.
The efficient secondary electron detection system further enhances analytical capabilities.