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In Situ Time-dependent Dielectric Breakdown in the Transmission Electron Microscope: A Possibility to Understand the Failure Mechanism in Microelectronic Devices
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Radiation damage in the TEM and SEM

R F Egerton1, P Li, M Malac

  • 1Department of Physics, University of Alberta, Faculty of Science, 412 Avadh Bhatia Phy, Edmonton T6G 2J1, Canada. regerton@ualberta.ca

Micron (Oxford, England : 1993)
|May 4, 2004
PubMed

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