Related Experiment Video
Updated: Aug 24, 2026
11:44
Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Static and quasi-static calibration of a bio-MEMS device
A J Slifka1, H Panchawagh, R L Mahajan
1NIST, Boulder, CO 80305, USA.
Biomedical Sciences Instrumentation
|May 12, 2004
Abstract:
A bio-MEMS device that has been designed to stimulate cells by oscillatory actuation in the vertical direction has been calibrated. The displacement of this device was determined experimentally by a laser interferometer when actuated by a static voltage, and by an atomic force microsope when actuated quasi-statically at 0.1 Hz. Both experimental calibrations were compared to a simple model.
