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Updated: Aug 24, 2026
Atomically Defined Templates for Epitaxial Growth of Complex Oxide Thin Films
Published on: December 4, 2014
Micropatterning of lanthanum-based oxide thin film on self-assembled monolayers
Yanfeng Gao1, Yoshitake Masuda, Kunihito Koumoto
1Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan.
Abstract:
We studied the direct micropatterning of a lanthanum-based thin film on a template of self-assembled monolayers in an aqueous solution at 80 degrees C. The template composed of silanol and octadecyl areas was prepared by UV-modified octadecyltrichlorosilane SAMs through a photomask. The amorphous La(2)O(CO(3))(2) x H(2)O thin films were selectively deposited in the silanol regions. Crystallized La(2)O(3) was obtained after heating at 800 degrees C in air.
