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In situ lift-out using a FIB-SEM system
1SFI Trinity Nanoscience Laboratory, Department of Physics, Trinity College Dublin, Dublin 2, Ireland. richard.langford@tcd.ie
Micron (Oxford, England : 1993)
|June 29, 2004
Summary
This study introduces an in situ lift-out technique for transmission electron microscopy specimen preparation using focused ion beam-SEM. Secondary electron imaging enhances control and success rates, especially for new users.
Area of Science:
- Materials Science
- Nanotechnology
- Microscopy
Background:
- Transmission Electron Microscopy (TEM) requires precisely prepared specimens.
- Traditional ex situ lift-out techniques can be challenging and have lower success rates.
- Focused Ion Beam-Scanning Electron Microscopy (FIB-SEM) offers advanced imaging capabilities.
Purpose of the Study:
- To present a novel in situ lift-out technique for TEM specimen preparation.
- To highlight the advantages of using secondary electron imaging within FIB-SEM for this process.
- To compare the new in situ method with existing ex situ and other in situ techniques.
Main Methods:
- Development and implementation of an in situ 'lift-out' technique within a FIB-SEM system.
- Utilizing secondary electron imaging for real-time monitoring and control during specimen extraction.
- Comparative analysis against ex situ lift-out and the 'wedge' in situ technique.
Main Results:
- The in situ technique allows for higher magnification imaging compared to optical microscopy.
- Enhanced control over the lift-out procedure, leading to increased success rates.
- Demonstrated effectiveness particularly for users with less experience in specimen preparation.
Conclusions:
- The presented in situ lift-out technique improves the reliability and ease of TEM specimen preparation.
- Secondary electron imaging in FIB-SEM is a key factor in the technique's success.
- This method offers a viable alternative for producing high-quality TEM specimens.
