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Related Experiment Videos

Soft X-ray multilayer beam splitters.

T Haga1, M C Tinone, M Shimada

  • 1NTT System Electronics Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-01, Japan.

Journal of Synchrotron Radiation
|July 21, 2004
PubMed
Summary
This summary is machine-generated.

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Researchers developed a self-standing Mo/Si multilayer beam splitter with a large, flat active area. This advanced beam splitter achieves 27% reflectivity and transmittance, crucial for advanced optical applications.

Area of Science:

  • Materials Science
  • Optics
  • Nanotechnology

Background:

  • Mo/Si multilayer mirrors are essential for extreme ultraviolet (EUV) optics.
  • Fabricating large-area, self-standing multilayer optics with high flatness is challenging.

Purpose of the Study:

  • To fabricate a semitransparent Mo/Si multilayer beam splitter with a self-standing active area.
  • To investigate the influence of membrane substrate roughness on beam splitter reflectivity.
  • To achieve precise control over multilayer stress for fabricating large, flat, and self-standing structures.

Main Methods:

  • Fabrication of Mo/Si multilayer structures with controlled stress.
  • Investigation of membrane substrate roughness effects.
  • Characterization using synchrotron radiation at 13.4 nm wavelength.

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Main Results:

  • A semitransparent Mo/Si multilayer beam splitter with a 10 x 10 mm self-standing active area and 1.1 nm (r.m.s.) flatness was successfully fabricated.
  • The beam splitter demonstrated a reflectivity and transmittance of 27% for s-polarization at 45 degrees and 13.4 nm.
  • Controlled tensile stress in the multilayer enabled the creation of a large, flat, self-standing reflective surface.

Conclusions:

  • The developed fabrication process allows for large-area, self-standing Mo/Si multilayer optics.
  • The precise stress control is key to achieving both flatness and self-standing capabilities.
  • The fabricated beam splitter shows promising performance for EUV applications requiring precise beam splitting.