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Related Experiment Videos

High-performance EUV/soft X-ray ellipsometry system using multilayer mirrors.

T Kawamura1, J J Delaunay, H Takenaka

  • 1NTT Basic Research Laboratories, 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-01, Japan.

Journal of Synchrotron Radiation
|July 21, 2004
PubMed
Summary

A new extreme ultraviolet/soft X-ray ellipsometry system was developed using multilayer mirrors. This system achieves high extinction ratios for precise optical measurements, enhancing material analysis capabilities.

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Area of Science:

  • Physics
  • Materials Science
  • Optical Engineering

Background:

  • Ellipsometry is a powerful technique for characterizing optical properties of materials.
  • Existing systems may face limitations in performance for extreme ultraviolet (EUV) and soft X-ray ranges.
  • Multilayer mirrors offer tunable optical properties crucial for advanced optical systems.

Purpose of the Study:

  • To develop a high-performance EUV/soft X-ray ellipsometry system.
  • To utilize multilayer mirrors for enhanced polarizer and analyzer performance.
  • To achieve high extinction ratios for improved measurement accuracy.

Main Methods:

  • Development of a novel ellipsometry system for EUV/soft X-ray applications.
  • Incorporation of multilayer mirrors for the polarizer and rotating analyzer components.

Related Experiment Videos

  • Optimization of multilayer mirrors to achieve a medium extinction of approximately 2000.

    • Main Results:

    • Achieved an extinction ratio of up to 10^4 for the polarizer using two multilayer mirrors.
    • Calculated reflectivity of the multilayer mirrors exceeded 35%.
    • Analysis of optical element errors indicated first-order errors for the polarizer and optical part misalignment, and second-order errors for the analyzer.

    Conclusions:

    • The developed EUV/soft X-ray ellipsometry system demonstrates high performance.
    • Multilayer mirrors are effective for achieving high extinction ratios and reflectivity in optical systems.
    • The error analysis provides insights for further system optimization and precision.