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Updated: Aug 23, 2026

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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Surface X-ray scattering system at the SRRC
Journal of Synchrotron Radiation
|July 21, 2004
Abstract:
A UHV surface X-ray scattering system has been constructed at the SRRC, providing users with a state-of-the-art system for performing X-ray scattering studies of two-dimensional crystallography, in situ growth mechanisms as well as phase transitions of surfaces and interfaces. A study of the phase transition of the Si(001) reconstructed surface was conducted to commission both the scattering system and the SRRC X-ray beamline. The detailed design and performance of the SRRC surface X-ray scattering system together with the results of the Si(001) study are presented.

