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Metal oxide-based monolithic complementary metal oxide semiconductor gas sensor microsystem.

Markus Graf1, Diego Barrettino, Stefano Taschini

  • 1Physical Electronics Laboratory, Swiss Federal Institute of Technology, ETH Zurich, HPT H8, CH-8093 Zurich, Switzerland. mgraf@iqe.phys.ethz.ch

Analytical Chemistry
|July 31, 2004
PubMed
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This study presents an integrated gas sensor microsystem with a micro hot plate and circuitry on a single chip. It achieves high precision in detecting carbon monoxide (CO) at sub-parts-per-million levels.

Area of Science:

  • Microelectronic Engineering
  • Chemical Sensing Technology
  • Nanomaterials Science

Background:

  • Development of integrated microsystems for gas sensing is crucial for portable and efficient monitoring.
  • Existing gas sensors often require complex external circuitry and calibration.
  • Nanocrystalline tin dioxide (SnO2) offers promising sensing properties for various gases.

Purpose of the Study:

  • To present a fully integrated gas sensor microsystem combining a micro hot plate and advanced circuitry on a single chip.
  • To demonstrate the performance of a novel micro hot plate with high temperature homogeneity and thermal efficiency.
  • To achieve precise detection of carbon monoxide (CO) concentrations at low levels.

Main Methods:

  • Fabrication of the sensor chip using a 0.8-microm CMOS process with subsequent micromachining.

Related Experiment Videos

  • Coating the micro hot plate with a nanocrystalline SnO2 thick film.
  • Integration of on-chip digital temperature controller and logarithmic converter.
  • Development of a robust prototype package using standard microelectronic packaging.

    • Main Results:

    • The circular micro hot plate (500 x 500 microm(2)) exhibits excellent temperature homogeneity (+/-2%) and thermal efficiency (6.0 degrees C/mW).
    • The on-chip temperature controller accurately maintains membrane temperature between 170-300°C (+/-2°C error).
    • The sensor detects CO concentrations in the sub-parts-per-million range with a resolution of +/-0.1 ppm CO.

    Conclusions:

    • The fully integrated gas sensor microsystem offers a compact and efficient solution for gas detection.
    • The developed microsystem demonstrates capability for measuring CO at threshold levels, crucial for safety applications.
    • This work paves the way for advanced, single-chip gas sensing solutions in various fields.