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Updated: Aug 23, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Convergent-beam low energy electron diffraction (CBLEED) and the measurement of surface dipole layers
J C H Spence1, H C Poon, D K Saldin
1Department of Physics and Astronomy, College of Liberal Arts and Science, Arizona State University, Tempe, AZ 85287-1504, USA. Spence@asu.edu
Abstract:
We propose the formation of LEED patterns using a highly convergent beam forming a probe of nanometer dimensions. A reflection rocking curve may then be recorded in many diffraction orders simultaneously. Multiple scattering calculations show that the intensity variations within these rocking curves is as sensitive to the parameters describing the surface dipole layer as conventional I/V scans. However the data may be collected from areas sufficiently small to avoid defects and surface steps, radiation damage controlled by use of low voltages, and the information depth selected by choice of the (constant) voltage. We briefly discuss also the application of this method to oxides and the formation of atomic-resolution scanning images in an idealized instrument in which coherent diffracted LEED orders overlap.

