Related Experiment Video
Updated: Aug 23, 2026

08:23
Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
Published on: September 28, 2019
Ion-assisted sputter deposition
1Surface Coatings Laboratory, Department of Chemistry and Materials, Manchester Metropolitan University, Manchester M1 5GD, UK.
Abstract:
A review of the development of the ion-assisted sputter-deposition process is given. The special features of thin films produced by this technique are outlined and some main applications and future developments are discussed.

