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Numerical analysis of an annular-aperture solid immersion lens

Cheng Liu1, Seung-Han Park

  • 1National Research Laboratory of Nonlinear Optics, Yonsei University, Seoul 120-749, South Korea. liucheng@phya.yonsei.ac.kr

Optics Letters
|September 9, 2004
PubMed
Summary

A novel annular-aperture solid immersion lens (SIL) enhances focal depth by combining annular aperture and SIL techniques. This innovation relaxes distance control, preventing optical head damage in data recording and lithography.

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