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Glove permeation by semiconductor processing mixtures containing glycol-ether derivatives
E T Zellers1, H Q Ke, D Smigiel
1University of Michigan, School of Public Health, Department of Environmental and Industrial Health, Ann Arbor 48109-2029.
American Industrial Hygiene Association Journal
|February 1, 1992
Summary
Butyl rubber gloves offer superior protection against semiconductor processing solvents, outperforming nitrile and natural rubber. Repeated exposure degrades nitrile glove performance, but butyl rubber remains effective, even at elevated temperatures.
Area of Science:
- Materials Science
- Chemical Engineering
- Occupational Safety
Background:
- Semiconductor manufacturing utilizes complex chemical formulations, including glycol-ether derivatives.
- Glove material selection is critical for protecting workers from hazardous chemical exposure during these processes.
Purpose of the Study:
- To evaluate the permeation resistance of various glove materials against specific semiconductor processing formulations.
- To determine the impact of temperature and repeated exposure on glove performance.
Main Methods:
- Permeation testing of nitrile, natural rubber, butyl rubber, PVC, and blended rubber gloves using ASTM F739-85 standard.
- Exposure to photoresist thinners, photoresists, and pure glycol-ether solvents at 25°C and 37°C.
Main Results:
- Butyl rubber demonstrated the highest protection, with no breakthrough for most formulations after 4 hours at 25°C.
- Nitrile rubber offered good protection against negative photoresists and initial solvent exposure.
- Elevated temperatures (37°C) significantly reduced breakthrough times and increased permeation rates for most gloves except butyl rubber.
- Repeated exposure degraded nitrile glove performance, while butyl rubber showed no such degradation.
Conclusions:
- Butyl rubber gloves are recommended for handling glycol-ether-based semiconductor processing chemicals due to their superior permeation resistance.
- Nitrile gloves require careful management regarding reuse and exposure conditions.
- Understanding glove material limitations is crucial for ensuring worker safety in semiconductor fabrication environments.